McMillan Model U709 will precisely measure very low flow rates of virtually any photoresist chemical, whether a short burst of flow or a continuous flow. Dispenses as short as 500 milliseconds and volumes as low as 0.1 grams can be detected repeatably.
McMillan Model U709 will precisely measure very low flow rates of virtually any photoresist chemical, whether a short burst of flow or a continuous flow. Dispenses as short as 500 milliseconds and volumes as low as 0.1 grams can be detected repeatably.
A wide variety of liquids may be measured. Repeatable results are achieved using a patented Pelton-type microturbine wheel. This proven design has been providing precision results since 1988 and has developed a well-deserved reputation for continuous operational service for many years without failure.
Because of it’s compact size and affordable cost, McMillan’s Model U709 Flow Sensor is suitable for a wide variety of industrial, commercial, laboratory and OEM applications. PTFE, FFKM, and Sapphire wetted parts ensure compatibility with chemicals commonly found in microelectronics manufacturing processes, including deionized water, CMP slurries, acids, solvents, and photoresist.
Continuous flow from 7 – 50 mL/min can be measured. Consult the factory or an authorized representative for custom requirements.
Model U709 units features a straight flow path, which allows all fluid connections inline with existing plumbing for simple installation.
Most units may be specified to operate with either 12 VDC or 24 VDC power. Various power adapters are also available for use with 12 VDC versions.
The Model U709 features a pulse output, typically
0-200 Hz up to 0-800 Hz (consult the unit’s calibration certificate for the exact frequency output).
Pulse output models have an accuracy specification of ±3.0% full scale (including linearity).
All units have PTFE male flare connections as standard.
All units come standard with a 7-Pin connector. Options available for a integrated FEP-jacketed cable terminated with pigtail leads.
PTFE, FFKM, and sapphire wetted parts ensure compatibility with chemicals commonly found in microelectronics manufacturing processes, including deionized water, CMP slurries, acids, solvents, and photoresist.
McMillan has a comprehensive range of remote displays for use with U70X Flow Sensors. For further information, please contact the factory or an authorized representative.
Flare Nuts (FN) Optional
Extremely compact package
Typical Repeatability, 1.0s Dispense
Typical Repeatability, 1.5s Dispense
Response at Various Viscosities
± 3.0% full scale
± 0.2% full scale
Working Pressure: 60 psig [ 4 barg ]
Overpressure Limit: 85 psig [ 5.8 barg ]
41 to 131 ºF [ 5 to 55 ºC ]
Operating Range: 41 to 131 ºF [ 5 to 55 ºC ]
Storage Range: 32 to 158 ºF [ 0 to 70 ºC ]
± 0.2% full scale or less per ºC
PTFE
Sapphire
FFKM
PFA
25 microns or less
Optimum performance with stable liquid viscosities (< 80 cS), degassed
7.5 VDC peak buffered square wave
0-400 Hz typical
12-15 VDC Units: 12-15 VDC, 50 mA typical
22-25 VDC Units: 22-25 VDC, 50 mA typical
7-pin connector
Nylon housing
None
None
Typically < 300 milliseconds for 97% of final value
Calibration should typically be verified once every 12 months
100,000 Hours MTBF
CE Approved; 89/336/EEC (EN 55011 & EN 50082-1)
73/23/EEC Low Voltage Directive
IP53 (NEMA 2)
1 Year Limited
| Categories | Title | Summary | File Size | Download |
|---|---|---|---|---|
| Data Sheets (PDF) | U70X_DS-709 2410 3.pdf | Latest data sheet for Model U709 Flow Sensor | 1 MB |
We are experts in all things flow. As a company founded and run by engineers, we seek to understand your application and then build a product solution that will solve your most difficult challenges.
McMillan Flow sales agents are strategically located across the
globe. Find your nearest distributor or office.
McMillan Company
7075 Ranch Rd 2338
Georgetown, TX 78633
sales@mcmflow.com
Phone: (844) MCM-FLOW
Copyright © 2024 McMillan Flow Products. All Rights Reserved.
McMillan Flow Products is located in the U.S.A. and all products are manufactured in our Texas plant.
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