Model U707
McMillan Model U707 UHP FLO-SENSORS will precisely measure flow rates of virtually any fluid as low as 15 mL/minute or as high as 10 L/minute. Repeatable results are achieved by using a patented microturbine flow sensor design. This design, unlike traditional paddlewheel designs, provides accurate flow measurement with no particle generation. PTFE, perfluoroelastomers, and sapphire wetted parts ensure compatibility with chemicals commonly found in microelectronics manufacturing processes, including deionized water, CMP slurries, acids, solvents, and photoresist.
These UHP FLO-SENSORS integrate the sensing element with advanced electronics to provide output signals proportional to flow rate. Each unit is individually calibrated before shipment, and a certificate of calibration accompanies all FLO-SENSORS. A repeatability specification of ±0.2% full scale reassures process engineers of consistent results.
The Model U707 features a compact footprint-reducing design and a pulse output.
Model U707 Features & Options
ACCURACY/LINEARITY
Pulse output models have an accuracy specification of ±3.0% full scale (including linearity).
CALIBRATION
All units are calibrated at the factory using deionized water. Calibration curves may be requested for fluids with viscosities differing from water.
DISPLAYS
McMillan has a comprehensive range of remote displays for use with UHP FLO-SENSORS. Please request further information from the factory.
ELECTRICAL CONNECTIONS
All units have an integrated 7-pin connector. Several mating cable options are available.
FLOW RANGES
Flow ranges from 15-100 mL/minute up to 1,000-10,000 mL/minute are available. Consult the factory for custom requirements.
FLUID CONNECTIONS
All units have male Flaretek- compatible connections. Non-standard connection types may be available upon request.
GANGS OF MULTIPLE UNITS
To reduce overall footprint in multiple-channel applications, McMillan can assemble custom gangs of U707/U708 FLO-SENSORS and assign a custom part number for the entire assembly. Please request details from the factory.
POWER
Units may be specified to operate with either 12 VDC or 24 VDC power. Various power adapters are available for use with 12 VDC versions.
SIGNAL OUTPUTS
The Model U707 features a pulse output, typically 0-400 Hz (consult calibration certificate for exact frequency output).
WETTED MATERIALS
All units have only PTFE, perfluoroelastomers, and sapphire as wetted parts.
Model U708
McMillan Model U708 UHP FLO-SENSORS will precisely measure flow rates of virtually any fluid as low as 15 mL/minute or as high as 10 L/minute. Repeatable results are achieved by using a patented microturbine flow sensor design. This design, unlike traditional paddlewheel designs, provides accurate flow measurement with no particle generation. PTFE, perfluoroelastomers, and sapphire wetted parts ensure compatibility with chemicals commonly found in microelectronics manufacturing processes, including deionized water, CMP slurries, acids, solvents, and photoresist.
These UHP FLO-SENSORS integrate the sensing element with advanced electronics to provide output signals proportional to flow rate. Each unit is individually calibrated before shipment, and a certificate of calibration accompanies all FLO-SENSORS. A repeatability specification of ±0.2% full scale reassures process engineers of consistent results.
The Model U708 features a compact footprint-reducing design and an analog output.
U708 Features & Options
ACCURACY/LINEARITY
Analog output models have an accuracy specification of ±1.0% full scale (including linearity).
CALIBRATION
All units are calibrated at the factory using deionized water. Calibration curves may be requested for fluids with viscosities differing from water.
DISPLAYS
McMillan has a comprehensive range of remote displays for use with UHP FLO-SENSORS. Please request further information from the factory.
ELECTRICAL CONNECTIONS
All units have an integrated 7-pin connector. Several mating cable options are available.
FLOW RANGES
Flow ranges from 15-100 mL/minute up to 1,000-10,000 mL/minute are available. Consult the factory for custom requirements.
FLUID CONNECTIONS
All units have male Flaretek- compatible connections. Non-standard connection types may be available upon request.
GANGS OF MULTIPLE UNITS
To reduce overall footprint in multiple-channel applications, McMillan can assemble custom gangs of U708 FLO-SENSORS and assign a custom part number for the entire assembly. Please request details from the factory.
POWER
Units may be specified to operate with either 12 VDC or 24 VDC power. Various power adapters are available for use with 12 VDC versions.
SIGNAL OUTPUTS
The Model U708 can be ordered with either a 4-20 mA, 0-5 VDC, or 0-10 VDC output.
WETTED MATERIALS
All units have only PTFE, perfluoroelastomers, and sapphire as wetted parts.
Pressure Drop
Specifications
- Accuracy (including linearity, best fit straight line):
- Model U707: ±3.0% Full Scale
Model U708: ±1.0% Full Scale - Repeatability:
- Model U707: ±0.2% Full Scale
Model U708: ±0.2% Full Scale - Pressure Rating:
- Model U707: 80 psig (5.4 bar) working
100 psig (6.8 bar) overpressure
Model U708: 80 psig (5.4 bar) working
100 psig (6.8 bar) overpressure - Temperature Rating (Fluid):
- Model U707: Standard: 0 to 55ºC
HT suffix: 0 to 90ºC
Model U708: Standard: 0 to 55ºC
HT suffix: 0 to 90ºC - Temperature Rating (Environment):
- Model U707: Operating: 0 to 50ºC
Storage: 0 to 70ºC
Model U708: Operating: 0 to 50ºC
Storage: 0 to 70ºC - Wetted Materials:
- Model U707: PTFE
Sapphire
Model U708: PTFE
Sapphire - Exterior Surfaces:
- Model U707: PTFE
Polypropylene
Epoxy
Viton
Polyester
Model U708: PTFE
Polypropylene
Epoxy
Viton
Polyester - O-Ring Material:
- Model U707: Perfluoroelastomer (contact factory for current compound)
Model U708: Perfluoroelastomer (contact factory for current compound) - Recommended Filtration:
- Model U707: 20 microns or less
Model U708: 20 microns or less - Compatible Liquids:
- Model U707: Low viscosity (<10 cS)
Translucent or transparent
Minimum amount of entrained air
Model U708: Low viscosity (<10 cS)
Translucent or transparent
Minimum amount of entrained air - Warm-Up Time:
- Model U707: None Model U708: None
- Zero Drift:
- Model U707: None Model U708: None
- Calibration Interval:
- Model U707: Calibration should typically be verified once every 12 months
Model U708: Calibration should typically be verified once every 12 months - Power Requirements:
- Model U707: 12-15 VDC: 12-15 VDC, 50 mA typical
22-25 VDC units: 22-25 VDC, 50 mA typical
Model U708: 12-15 VDC: 12-15 VDC, 50 mA typical
15-25 VDC Units: 15-25 VDC, 75 mA typical
22-25 VDC units: 22-25 VDC, 50 mA typica - Electrical Connections:
- Model U707: 7-pin connector
PTFE housing when used with CFx cables
Nylon housing when used with CPx cables
Model U708: 7-pin connector
PTFE housing when used with CFx cables
Nylon housing when used with CPx cables - Typical Response Time:
- Model U707: Typically <300 milliseconds for 97% of final value
Model U708: Typically <1 second for 97% of final value - Reliability:
- Model U707: 100,000 Hours MTBF (testing ongoing)
Model U708: 100,000 Hours MTBF (testing ongoing) - Approvals/Certifications:
- Model U707: CE Approved
89/336/EEC (EN 55011 & EN 50082-1)
73/23/EEC Low Voltage Directive
Model U708: CE Approved
89/336/EEC (EN 55011 & EN 50082-1)
73/23/EEC Low Voltage Directive - Ratings:
- Model U707: IP64 (NEMA 4X)
Model U708: IP64 (NEMA 4X) - Pulse Output:
- Model U707: Square-wave
Collector output
Pulls up to V+ - 0-10 VDC Output:
- Model U708: Optional
0 VDC at zero flow
5 Kohm or greater output load
Not isolated - 4-20 mA Output:
- Model U708: Optional
4 mA at zero flow
500 ohm maximum current loop
Not isolated - 0-5 VDC Output:
- Model U708: Optional
0 VDC at zero flow
2.5 Kohm or greater output load
Not isolated
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