Select model:
U701 | U702 | U705 | U706
Model U701
McMillan Model U701 UHP FLO-SENSORS will precisely measure flow rates of virtually any fluid as low as 15 mL/minute or as high as 50 L/minute. Repeatable results are achieved by using a patented microturbine flow sensor design. This design, unlike traditional paddlewheel designs, provides accurate flow measurement with no particle generation. PTFE, perfluoroelastomers, and sapphire wetted parts ensure compatibility with chemicals commonly found in microelectronics manufacturing processes, including deionized water, CMP slurries, acids, solvents, and photoresist.
These UHP FLO-SENSORS integrate the sensing element with advanced electronics to provide output signals proportional to flow rate. Each unit is individually calibrated before shipment, and a certificate of calibration accompanies all FLO-SENSORS. A repeatability specification of ±0.2% full scale reassures process engineers of consistent results.
The Model U701 features a U-shaped space-saving flow path and pulse output.
Model U701 Features & Options
ACCURACY/LINEARITY
Pulse output models have an accuracy specification of ±3.0% full scale (including linearity).
CALIBRATION
All units are calibrated at the factory using deionized water. Calibration curves may be requested for fluids with viscosities differing from water.
DISPLAYS
McMillan has a comprehensive range of remote displays for use with UHP FLO-SENSORS. Please request further information from the factory.
ELECTRICAL CONNECTIONS
All units have an integrated FEP-jacketed cable terminated with pigtail leads.
FLOW PATH
U702 FLO-SENSORS feature a U-shaped flow path, which allows all fluid connections on one side of the unit to effectively reduce footprint.
FLOW RANGES
Flow ranges from 15-100 mLpm up to 5-50 Lpm are available. Consult the factory for custom requirements.
FLUID CONNECTIONS
All units have male Flaretek-compatible connections as standard. Nippon Pillar Super 300 or other non-standard connection types may be available upon request.
POWER
Units may be specified to operate with either 12 VDC or 24 VDC power. Various power adapters are available.
SIGNAL OUTPUTS
The Model U701 features a pulse output, typically 0-400 Hz (consult calibration certificate for exact frequency output).
WETTED MATERIALS
All units have only PTFE, perfluoroelastomers, and sapphire as wetted parts.
Model U702
McMillan Model U702 UHP FLO-SENSORS will precisely measure flow rates of virtually any fluid as low as 15 mL/minute or as high as 50 L/minute. Repeatable results are achieved by using a patented microturbine flow sensor design. This design, unlike traditional paddlewheel designs, provides accurate flow measurement with no particle generation. PTFE, perfluoroelastomers, and sapphire wetted parts ensure compatibility with chemicals commonly found in microelectronics manufacturing processes, including deionized water, CMP slurries, acids, solvents, and photoresist.
These UHP FLO-SENSORS integrate the sensing element with advanced electronics to provide output signals proportional to flow rate. Each unit is individually calibrated before shipment, and a certificate of calibration accompanies all FLO-SENSORS. A repeatability specification of ±0.2% full scale reassures process engineers of consistent results.
The Model U702 features a U-shaped space-saving flow path and an analog output.
U702 Features & Options
ACCURACY/LINEARITY
Analog output models have an accuracy specification of ±1.0% full scale (including linearity).
CALIBRATION
All units are calibrated at the factory using deionized water. Calibration curves may be requested for fluids with viscosities differing from water.
DISPLAYS
McMillan has a comprehensive range of remote displays for use with UHP FLO-SENSORS. Please request further information from the factory.
ELECTRICAL CONNECTIONS
All units have an integrated FEP-jacketed cable terminated with pigtail leads.
FLOW PATH
U702 FLO-SENSORS feature a U-shaped flow path, which allows all fluid connections on one side of the unit to effectively reduce footprint.
FLOW RANGES
Flow ranges from 15-100 mLpm up to 5-50 Lpm are available. Consult the factory for custom requirements.
FLUID CONNECTIONS
All units have male Flaretek-compatible connections as standard. Nippon Pillar Super 300 or other non-standard connection types may be available upon request.
POWER
Units may be specified to operate with either 12 VDC or 24 VDC power. Various power adapters are available.
SIGNAL OUTPUTS
Model U702 can be ordered with a 4-20 mA, 0-5 VDC, or 0-10 VDC output.
WETTED MATERIALS
All units have only PTFE, perfluoroelastomers, and sapphire as wetted parts.
Model U705
McMillan Model U705 UHP FLO-SENSORS will precisely measure flow rates of virtually any fluid as low as 15 mL/minute or as high as 50 L/minute. Repeatable results are achieved by using a patented microturbine flow sensor design. This design, unlike traditional paddlewheel designs, provides accurate flow measurement with no particle generation. PTFE, perfluoroelastomers, and sapphire wetted parts ensure compatibility with chemicals commonly found in microelectronics manufacturing processes, including deionized water, CMP slurries, acids, solvents, and photoresist.
These UHP FLO-SENSORS integrate the sensing element with advanced electronics to provide output signals proportional to flow rate. Each unit is individually calibrated before shipment, and a certificate of calibration accompanies all FLO-SENSORS. A repeatability specification of ±0.2% full scale reassures process engineers of consistent results.
The Model U705 features a straight flow path and a pulse output.
U705 Features & Options
ACCURACY/LINEARITY
Pulse output models have an accuracy specification of ±3.0% full scale (including linearity).
CALIBRATION
All units are calibrated at the factory using deionized water. Calibration curves may be requested for fluids with viscosities differing from water.
DISPLAYS
McMillan has a comprehensive range of remote displays for use with UHP FLO-SENSORS. Please request further information from the factory.
ELECTRICAL CONNECTIONS
All units have an integrated FEP-jacketed cable terminated with pigtail leads. FLOW PATH U705 FLO-SENSORS feature a straight flow path.
FLOW RANGES
Flow ranges from 15-100 mLpm up to 5-50 Lpm are available. Consult the factory for custom requirements.
FLUID CONNECTIONS
All units have male Flaretek-compatible connections as standard. Nippon Pillar Super 300 or other non-standard connection types may be available upon request.
POWER
Units may be specified to operate with either 12 VDC or 24 VDC power. Various power adapters are available.
SIGNAL OUTPUTS
The Model U705 features a pulse output, typically 0-400 Hz (consult calibration certificate for exact frequency output).
WETTED MATERIALS
All units have only PTFE, perfluoroelastomers, and sapphire as wetted parts.
Model U706
McMillan Model U706 UHP FLO-SENSORS will precisely measure flow rates of virtually any fluid as low as 15 mL/minute or as high as 50 L/minute. Repeatable results are achieved by using a patented microturbine flow sensor design. This design, unlike traditional paddlewheel designs, provides accurate flow measurement with no particle generation. PTFE, perfluoroelastomers, and sapphire wetted parts ensure compatibility with chemicals commonly found in microelectronics manufacturing processes, including deionized water, CMP slurries, acids, solvents, and photoresist.
These UHP FLO-SENSORS integrate the sensing element with advanced electronics to provide output signals proportional to flow rate. Each unit is individually calibrated before shipment, and a certificate of calibration accompanies all FLO-SENSORS. A repeatability specification of ±0.2% full scale reassures process engineers of consistent results.
The Model U706 features a straight flow path and an analog output.
U706 Features & Options
ACCURACY/LINEARITY
Analog output models have an accuracy specification of ±1.0% full scale (including linearity).
CALIBRATION
All units are calibrated at the factory using deionized water. Calibration curves may be requested for fluids with viscosities differing from water.
DISPLAYS
McMillan has a comprehensive range of remote displays for use with UHP FLO-SENSORS. Please request further information from the factory.
ELECTRICAL CONNECTIONS
All units have an integrated FEP-jacketed cable terminated with pigtail leads. FLOW PATH
U706 FLO-SENSORS feature a straight flow path. FLOW RANGES
Flow ranges from 15-100 mLpm up to 5-50 Lpm are available. Consult the factory for custom requirements.
FLUID CONNECTIONS
All units have male Flaretek-compatible connections as standard. Nippon Pillar Super 300 or other non-standard connection types may be available upon request.
POWER
Units may be specified to operate with either 12 VDC or 24 VDC power. Various power adapters are available.
SIGNAL OPTIONS
The Model U706 can be ordered with a 4-20 mA, 0-5 VDC, or 0-10 VDC output.
WETTED MATERIALS
All units have only PTFE, perfluoroelastomers, and sapphire as wetted parts.
Pressure Drop
Specifications
- Accuracy (including linearity, best fit straight line):
- Model U701: ±3.0% Full Scale
Model U702: ±1.0% Full Scale
Model U705: ±3.0% Full Scale
Model U706: ±1.0% Full Scale - Repeatability:
- Model U701: ±0.20% Full Scale
Model U702: ±0.20% Full Scale
Model U705: ±0.20% Full Scale
Model U706: ±0.20% Full Scale - Pressure Rating:
- Model U701: 80 psig (5.4 bar) working
100 psig (6.8 bar) overpressure
Model U702: 80 psig (5.4 bar) working
100 psig (6.8 bar) overpressure
Model U705: 80 psig (5.4 bar) working
100 psig (6.8 bar) overpressure
Model U706: 80 psig (5.4 bar) working
100 psig (6.8 bar) overpressure - Temperature Rating (Fluid):
- Model U701: Standard: 0 to 55ºC
HT Suffix: 0 to 90ºC
Model U702: Standard: 0 to 55ºC
HT Suffix: 0 to 90ºC
Model U705: Standard: 0 to 55ºC
HT Suffix: 0 to 90ºC
Model U706: Standard: 0 to 55ºC
HT Suffix: 0 to 90ºC - Temperature Rating (Environment):
- Model U701: Operating: 0 to 50ºC
Storage: 0 to 70ºC
Model U702: Operating: 0 to 50ºC
Storage: 0 to 70ºC
Model U705: Operating: 0 to 50ºC
Storage: 0 to 70ºC
Model U706: Operating: 0 to 50ºC
Storage: 0 to 70ºC - Wetted Materials:
- Model U701: PTFE
Sapphire
Model U702: PTFE
Sapphire
Model U705: PTFE
Sapphire
Model U706: PTFE
Sapphire - Exterior Surfaces:
- Model U701: PTFE
Polypropylene
Epoxy
Viton
Polyester
Model U702: PTFE
Polypropylene
Epoxy
Viton
Polyester
Model U705: PTFE
Polypropylene
Epoxy
Viton
Polyester
Model U706: PTFE
Polypropylene
Epoxy
Viton
Polyester - O-Ring Material:
- Model U701: Perfluoroelastomer;
Contact factory for current compound.
Model U702: Perfluoroelastomer;
Contact factory for current compound.
Model U705: Perfluoroelastomer;
Contact factory for current compound.
Model U706: Perfluoroelastomer;
Contact factory for current compound. - Recommended Filtration:
- Model U701: 20 microns or less
Model U702: 20 microns or less
Model U705: 20 microns or less
Model U706: 20 microns or less - Compatible Liquids:
- Model U701: Low viscosity (<10 cS recommended)
Translucent or transparent
Minimum amount of entrained air
Model U702: Low viscosity (<10 cS recommended)
Minimum amount of entrained air
Model U705: Low viscosity (<10 cS recommended)
Minimum amount of entrained air
Translucent or transparent
Model U706: Low viscosity (<10 cS recommended)
Minimum amount of entrained air - Warm-Up Time:
- Model U701: None Model U702: None Model U705: None Model U706: None
- Zero Drift:
- Model U701: None Model U702: None Model U705: None Model U706: None
- Calibration Interval:
- Model U701: Calibration should typically be verified once every 12 months
Model U702: Calibration should typically be verified once every 12 months
Model U705: Calibration should typically be verified once every 12 months
Model U706: Calibration should typically be verified once every 12 months - Power Requirements:
- Model U701: 12-15 VDC Units: 12-15 VDC, 50 mA typical
15-25 VDC Units: 15-25 VDC, 75 mA typical
22-25 VDC Units: 22-25 VDC, 50 mA typical
Model U702: 12-15 VDC Units: 12-15 VDC, 50 mA typical
15-25 VDC Units: 15-25 VDC, 75 mA typical
22-25 VDC Units: 22-25 VDC, 50 mA typical
Model U705: 12-15 VDC Units: 12-15 VDC, 50 mA typical
15-25 VDC Units: 15-25 VDC, 75 mA typical
22-25 VDC Units: 22-25 VDC, 50 mA typical
Model U706: 12-15 VDC Units: 12-15 VDC, 50 mA typical
15-25 VDC Units: 15-25 VDC, 75 mA typical
22-25 VDC Units: 22-25 VDC, 50 mA typical - Electrical Connections:
- Model U701: Integrated FEP-jacketed cable with pigtail leads
Model U702: Integrated FEP-jacketed cable with pigtail leads
Model U705: Integrated FEP-jacketed cable with pigtail leads
Model U706: Integrated FEP-jacketed cable with pigtail leads - Typical Response Time:
- Model U701: Typically <300 milliseconds for 97% of final value
Model U702: Typically <1 second for 97% of final value
Model U705: Typically <300 milliseconds for 97% of final value
Model U706: Typically <1 second for 97% of final value - Reliability:
- Model U701: 100,000 Hours MTBF
Model U702: 100,000 Hours MTBF
Model U705: 100,000 Hours MTBF
Model U706: 100,000 Hours MTBF - Approvals/Certifications:
- Model U701: CE Approved 89/336/EEC (EN 55011 & EN 50082-1)
73/23/EEC Low Voltage Directive
Model U702: CE Approved 89/336/EEC (EN 55011 & EN 50082-1)
73/23/EEC Low Voltage Directive
Model U705: CE Approved 89/336/EEC (EN 55011 & EN 50082-1)
73/23/EEC Low Voltage Directive
Model U706: CE Approved 89/336/EEC (EN 55011 & EN 50082-1)
73/23/EEC Low Voltage Directive - Ratings:
- Model U701: IP53 (NEMA 2)
Model U702: IP53 (NEMA 2)
Model U705: IP53 (NEMA 2)
Model U706: IP53 (NEMA 2) - Pulse Output:
- Model U701: Square-wave
Passive BOSFET
Opto-Isolated up to 2500 V
0-400 Hz typical
Model U705: Square-wave
Passive BOSFET
Opto-Isolated up to 2500 V
0-400 Hz typical - 0-10 VDC Output:
- Model U702: Optional
0 VDC at zero flow
5 Kohm or greater output load
Not isolated
Model U706: Optional
0 VDC at zero flow
5 Kohm or greater output load
Not isolated - 4-20 mA Output:
- Model U702: Optional
4 mA at zero flow
500 ohm maximum loop resistance
Not isolated
Model U706: Optional
4 mA at zero flow
500 ohm maximum loop resistance
Not isolated - 0-5 VDC Output:
- Model U702: Optional
0 VDC at zero flow
2.5 Kohm or greater output load
Not isolated
Model U706: Optional
0 VDC at zero flow
2.5 Kohm or greater output load
Not isolated
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