Flow Devices for Microelectronics
McMillan is an established leader in providing precision liquid flow measurement and control solutions for semiconductor, flat panel display, and LED lighting manufacturing applications. CMP, CVD, FPD, ALD, and photoresist dispense are common applications.
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Common Products for Microelectronic Applications
IRIDIUM Series
The IRIDIUM controls liquid flow rates precisely. It can be easily used standalone on a bench top or built into equipment.
Electromagnetic flow meters for use with conductive liquids. Compact and capable of measuring flows of wide ranges precisely.
U70X Series
McMillan U70X Series Flow Sensors are constructed from PTFE and designed for corrosive and high-purity applications.