Applications: Microelectronics

Flow Devices for Microelectronics

McMillan is an established leader in providing precision liquid flow measurement and control solutions for semiconductor, flat panel display, and LED lighting manufacturing applications. CMP, CVD, FPD, ALD, and photoresist dispense are common applications. 

Need help finding the right solution? Use our product finder to narrow down your options. Or contact one of our engineers to discuss details. 

Common Products for Microelectronic Applications

IRIDIUM Series

The IRIDIUM controls liquid flow rates precisely. It can be easily used standalone on a bench top or built into equipment. 

Electromagnetic flow meters for use with conductive liquids. Compact and capable of measuring flows of wide ranges precisely. 

U70X Series

McMillan U70X Series Flow Sensors are constructed from PTFE and designed for corrosive and high-purity applications.

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