Model U701

SKU U701 Categories ,

The U701 is a PTFE liquid flow sensor featuring a U-shaped flow path for compact fluid connections and a pulse output. McMillan U70X Series Flow Sensors are capable of measuring extremely low flow rates of high-purity or corrosive media. Units are available that measure liquids as low as 13 mL/min and as high as 50 L/min.

Flow Technology
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Description

The U701 is a PTFE liquid flow sensor featuring a U-shaped flow path for compact fluid connections and a pulse output. McMillan U70X Series Flow Sensors are capable of measuring extremely low flow rates of high-purity or corrosive media. Units are available that measure liquids as low as 13 mL/min and as high as 50 L/min.

A wide variety of liquids may be measured. Repeatable results are achieved using a patented Pelton-type microturbine wheel. This proven design has been providing precision results since 1988 and has developed a well-deserved reputation for continuous operational service for many years without failure. 

Because of their robust design and precision measurement capability,  McMillan’s Model U70X Series are suitable for a wide variety of industrial, commercial, laboratory and OEM applications. PTFE, FFKM, and Sapphire wetted parts ensure compatibility with chemicals commonly found in microelectronics manufacturing processes, including deionized water, CMP slurries, acids, solvents, and photoresist.

Features & Options

FLOW RANGES

Flow ranges from 13 – 100 mL/minute up to 5 – 50 L/minute are available. Consult the factory or an authorized representative for custom requirements.

FLOW PATH

Model U701 units features a U-shaped flow path, which allows all fluid connections on one side of the unit to effectively reduce footprint.

POWER

Most units may be specified to operate with either 12 VDC or 24 VDC power. Various power adapters are also available for use with 12 VDC versions.

SIGNAL OUTPUTS

Model U701 units feature a pulse output.

ACCURACY/LINEARITY

Pulse output models have an accuracy specification of ±3.0% full scale (including linearity).

FLUID CONNECTIONS

All units have PTFE male flare connections as standard.

ELECTRICAL CONNECTIONS

All units have an integrated FEP-jacketed cable terminated with pigtail leads.

WETTED MATERIALS

PTFE, FFKM, and sapphire wetted parts ensure compatibility with chemicals commonly found in microelectronics manufacturing processes, including deionized water, CMP slurries, acids, solvents, and photoresist.

DISPLAYS

McMillan has a comprehensive range of remote displays for use with U70X Flow Sensors. For further information, please contact the factory or an authorized representative.

FLARE NUT (FN) OPTION

Specifications

Compatible Gases
Accuracy (including linearity, best fit straight line)

± 3.0% full scale

Repeatability

± 0.2% full scale

Pressure Rating

Working Pressure: 60 psig [ 4 barg ]
Overpressure Limit: 85 psig [ 5.8 barg ]

Temperature Rating (Fluid)

32 to 131 ºF [ 0 to 55 ºC ]

Temperature Rating (Environment)

Operating Range: 41 to 131 ºF [ 5 to 55 ºC ]
Storage Range: 32 to 158 ºF [ 0 to 70 ºC ]

Temperature Sensitivity

± 0.2% full scale or less per ºC

Wetted Materials

PTFE
Sapphire
FFKM

Recommended Filtration

25 microns or less

Compatible Media

Low viscosity (< 15 cS), translucent or transparent, degassed

Pulse Output Signal

Square-wave
Passive BOSFET
Opto-Isolated up to 2500 V
0 to 400 Hz typical

Power Requirements

12-15 VDC Units: 12-15 VDC, 50 mA typical
22-25 VDC Units: 22-25 VDC, 50 mA typical

Electrical Connections

FEP-jacketed cable with pigtail leads

Zero Drift

None

Warm-Up Time

None

Response Time

Typically < 300 milliseconds for 97% of final value

Calibration Interval

Calibration should typically be verified once every 12 months

Reliability

100,000 Hours MTBF

Certifications

CE Approved; 89/336/EEC (EN 55011 & EN 50082-1)
73/23/EEC Low Voltage Directive

Ratings

IP53 (NEMA 2)

Warranty

1 Year Limited

Downloads

CategoriesTitleSummaryFile SizeDownload
Data Sheets (PDF)U70X_DS-701 2410 5.pdf

Latest data sheet for Models U701, U702, U705 and U706

2 MB

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