Model U803
McMillan Model U803 UHP FLO-CONTROLLERS will precisely measure and control flow rates of virtually any fluid as low as 7 mLpm or as high as 1 Lpm. Repeatable results are achieved by using a patented microturbine flow sensor design. This design, unlike traditional paddlewheel designs, provides accurate flow measurement with no particle generation. An integrated proportional control valve is utilized to regulate flow rate. PTFE, perfluoroelastomers, and sapphire wetted parts ensure compatibility with chemicals commonly found in microelectronics manufacturing processes, including deionized water, CMP slurries, acids, solvents, and photoresist.
Each unit is individually calibrated before shipment, and a certificate of calibration accompanies all FLO-CONTROLLERS. A repeatability capability of ±0.2% full scale reassures process engineers of consistent results.
Model U803 Features & Options
ACCURACY/LINEARITY
All models have an accuracy specification of ±1.0% full scale (including linearity).
CALIBRATION
All units are calibrated at the factory using deionized water. Calibration curves may be requested for fluids with viscosities differing from water.
ELECTRICAL CONNECTIONS
All units have an integrated 7-pin connector. Several mating cable options are available.
FLOW PATH TYPE
The Model U803 FLO-CONTROLLER has a space-saving design with the inlet and output on the same side.
FLOW RANGES
Flow ranges from 7-50 mLpm up to 100-1,000 mLpm are available. Consult the factory for custom requirements.
FLUID CONNECTIONS
All units have male Flaretek compatible connections. Non-standard connection types may be available upon request.
POWER
Units operate with 24 VDC power.
SIGNAL CONFIGURATION
Units may be ordered with a 4-20 mA, 0-5 VDC, or 0-10 VDC configuration.
WETTED MATERIALS
All units have only PTFE, perfluoroelastomers, and sapphire as wetted parts.
Model U804
McMillan Model U804 UHP FLO-CONTROLLERS will precisely measure and control flow rates of virtually any fluid as low as 7 mLpm or as high as 1 Lpm. Repeatable results are achieved by using a patented microturbine flow sensor design. This design, unlike traditional paddlewheel designs, provides accurate flow measurement with no particle generation. An integrated proportional control valve is utilized to regulate flow rate. PTFE, perfluoroelastomers, and sapphire wetted parts ensure compatibility with chemicals commonly found in microelectronics manufacturing processes, including deionized water, CMP slurries, acids, solvents, and photoresist.
Each unit is individually calibrated before shipment, and a certificate of calibration accompanies all FLO-CONTROLLERS. A repeatability capability of ±0.2% full scale reassures process engineers of consistent results.
U804 Features & Options
ACCURACY/LINEARITY
All models have an accuracy specification of ±1.0% full scale (including linearity).
CALIBRATION
All units are calibrated at the factory using deionized water. Calibration curves may be requested for fluids with viscosities differing from water.
ELECTRICAL CONNECTIONS
All units have an integrated 7-pin connector. Several mating cable options are available.
FLOW PATH TYPE
The Model U804 FLO CONTROLLER is an inline unit particularly suitable for applications where an existing unit needs to be replaced.
FLOW RANGES
Flow ranges from 7-50 mLpm up to 100-1,000 mLpm are available. Consult the factory for custom requirements.
FLUID CONNECTIONS
All units have male Flaretek compatible connections. Non-standard connection types may be available upon request.
POWER
Units operate with 24 VDC power.
SIGNAL CONFIGURATION
Units may be ordered with a 4-20 mA, 0-5 VDC, or 0-10 VDC signal configuration.
WETTED MATERIALS
All units have only PTFE, perfluoroelastomers, and sapphire as wetted parts.
Specifications
- Accuracy (including linearity, best fit straight line):
- ±1.0% Full Scale
- Repeatability:
- ±0.2% Full Scale
- Pressure Rating:
- 80 psig (5.4 bar) maximum working
100 psig (6.8 bar) overpressure - Temperature Rating (Fluid):
- 5 to 45ºC
- Temperature Rating (Environment):
- Operating: 5 to 45ºC
Storage: 0 to 70ºC - Valve Type:
- PTFE cam-driven diaphragm
Not recommended for positive shutoff - Wetted Materials:
- PTFE
Sapphire - Exterior Surfaces:
- PTFE
Polypropylene
PVC
Polyester - O-Ring Material:
- Perfluoroelastomer (contact factory for current compound)
- Recommended Filtration:
- 20 microns or less
- Compatible Liquids:
- Low viscosity (<10 cS)
Minimum amount of entrained air - Warm-Up Time:
- Model U803: None
- Zero Drift:
- None
- Calibration Interval:
- Calibration should typically be verified once every 12 months
- Power Requirements:
- 22-25 VDC
250 mA typical (1A peak) - Electrical Connections:
- 7-pin connector
Nylon housing when used with CVx cables - Typical Response Time:
- Typically less than 3 seconds for 97% of final value
- Reliability:
- 100,000 hours MTBF (testing ongoing)
- Approvals/Certifications:
- CE Approved
89/336/EEC (EN 55011 & EN 50082-1)
73/23/EEC Low Voltage Directive - Ratings:
- IP64 (NEMA 4X)
- 0-10 VDC Output:
- 0 VDC at zero flow
5 Kohm or greater output load
Not isolated - 4-20 mA Output:
- 4 mA at zero flow
250 ohm maximum current loop
Not isolated - 0-5 VDC Output:
- 0 VDC at zero flow
2.5 Kohm or greater output load
Not isolated - 0-10 VDC Input:
- 0 VDC at zero flow Input load is 100 Kohms Not Isolated from ground
- 0-5 VDC Input:
- 0 VDC at zero flow Input load is 100 Kohms Not Isolated from ground
- 4-20 mA Input:
- 4 mA at zero flow Input load is less than 50 ohms Not Isolated from ground
- Standby Mode:
- Disables valve (freezes)
Automatically engaged when set point is less than 5% of full scale
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